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TLC series——Anode Layer Ion Source Coating Machine

The TLC series anode layer ion source coating equipment integrates advanced Magnetron Sputtering (MS) and anode layer ion source technology, offering enhanced performance for high-quality thin film deposition. The anode layer ion source is a cold cathode gas ion source with a simple structure, large ion beam current, and high stability. It is widely used in ion beam assisted deposition, surface cleaning, and film densification.

This equipment significantly improves coating adhesion, uniformity, and compactness by precisely controlling ion energy during the deposition process. A major application is the deposition of Diamond-Like Carbon (DLC) coatings, known for low internal stress, high hardness, excellent wear resistance, and low friction.

These properties make DLC coatings ideal for automotive parts, precision tools, medical devices, and aerospace components. The TLC series also supports various other materials, providing flexible solutions for different industrial applications. With efficient process control and environmental friendliness, the TLC series offers a reliable and cost-effective platform for high-performance surface engineering.

    Product Advantage

    Magnetron sputtering & Anode layer ion source

    Hydrogen containing DLC coating

    High hardness & wear resistance

    Deposition temperatures can be as low as 100°C

    Product Characteristics

    • Product characteristics
      The anode layer ion source is used to ionize the carbon-containing gas and deposit the a-C:H coating
    • Product characteristics
      DLC, CrN, WC, W-DLC and other coatings can be deposited
    • Product characteristics
      The deposition temperature is low, the lowest is 100°C Cand the substrate is wide
    • Product characteristics
      Smooth surface, does not change the product roughness
    • Product characteristics
      The branchus elegans has high hardness and low frictioncoefficient
    TLC  (1)

    Product Parameter

    Properties TLC800
    Coating technology Magnetron sputtering&Anode layer ion source
    Coating Type Cr/WCC/DLC
    Etching WET Lateral Hot Filament Etching
    MS Cathodes (number) 2
    Anode layer ion source (number) 2
    Equipment size(mm) Length*Width*Height: 3000*2200*2600
    Volume(m³) 0.7
    Effective coating area(mm) Ф650*400
    Maximum working temperature(℃) 350℃
    Power(kW) 100
    Capacity (number of trees) ade-to-order
    Maximum loading weight(KG) 500
    Spindle diameter(mm) max Ф250
    Process time(h) DLC:15~20
    TLC  (3)
    Properties TLC1500
    Coating technology Magnetron sputtering&Anode layer ion source
    Coating Type Cr/WCC/DLC
    Etching WET Lateral Hot Filament Etching
    MS Cathodes (number) 2
    Anode layer ion source (number) 2
    Equipment size(mm) Length*Width*Height: 3400*2750*2600
    Volume(m³) 1.5
    Effective coating area(mm) Ф940*900
    Maximum working temperature(℃) 350℃
    Power(kW) 120
    Capacity (number of trees) ade-to-order
    Maximum loading weight(KG) 1000
    Spindle diameter(mm) max Ф300
    Process time(h) DLC:15~20
    TLC (2)

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