OPT-S 1800 – Magnetron Sputtering Optical Coating Equipment
15 +
Years Experience
700 +
Installations Worldwide
OEM
Solutions Available
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Countries & Regions
8 Sputtering Sources
OPT-S 1800 is listed with 8 sputtering sources, with planar or cylindrical source options.
Online Optical Monitoring
The optical monitoring system provides real-time spectral monitoring and deposition endpoint control for multilayer films.
Planetary Workpiece Motion
Workpiece revolution and rotation support film-thickness distribution during optical multilayer deposition.
Dense Optical Films
The sputtering process supports dense, adherent films with low absorption and scattering losses.
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Φ940 × H1600 mm effective coating area
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Φ1200 × H2180 mm chamber
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Φ170 × 12 shafts workpiece carrier specification
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8 sputtering sources
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8 molecular pumps
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Touch-screen and PLC control
Model |
OPT-S 1800 |
| Coating Technology | Magnetron sputtering |
| Etching Technology | Ion-source etching |
| Substrate Materials | Glass, crystalline materials, polymers, ceramics and metals |
Equipment Structure |
Integrated vertical system; side-opening door; 2 viewing windows |
Workpiece Carrier Motion |
Vertical planetary cylindrical workpiece carrier system |
Working Temperature |
Adjustable from room temperature to 300°C |
Ultimate Vacuum |
8 × 10⁻⁵ Pa (no-load, clean-room condition) |
| Control Modes | Manual / semi-automatic / fully automatic; touch screen + PLC |
| Process Gases | Argon, nitrogen, oxygen and acetylene |
| Optical Monitoring | Online optical monitoring system (OMS) |
| Bias Power Supplies | 1 |
| Equipment Dimensions (L × W × H) | L4.0 × W2.1 × H3.3 m |
Find answers about OPT-S 1800 optical coating equipment, including its coating process, applications and specifications.
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1. What is OPT-S 1800 optical coating equipment used for?
OPT-S 1800 belongs to the OPT-S series of magnetron sputtering optical coating systems. Listed applications include optical lenses, automotive panels, display screens, LiDAR and head-up displays.
2. What substrates and coatings are listed for the OPT-S series?
Substrates include glass, crystalline materials, polymers, ceramics and metals. Listed coatings include cut-off, band-pass and RGB filters, AR, hard AR, IR-AR, HR, AS/AF and ITO.
3. What are the chamber size and effective coating area of OPT-S 1800?
The chamber is Φ1200 × H2180 mm. The effective coating area is Φ940 × H1600 mm. These are separate specifications.
4. How many sputtering sources does OPT-S 1800 have?
OPT-S 1800 is listed with 8 sputtering sources. Planar and cylindrical source configurations are listed as options.
5. What workpiece carrier configuration is listed?
The listed workpiece carrier specification is Φ170 × 12 shafts, adjustable according to requirements. The system uses a vertical planetary cylindrical workpiece carrier.
6. How are optical multilayers monitored?
The OPT-S series uses an online optical monitoring system for real-time spectral monitoring and deposition endpoint control. Carrier revolution and rotation support film-thickness distribution.
7. What are the working temperature and dimensions of OPT-S 1800?
Working temperature is adjustable from room temperature to 300°C. Equipment dimensions are L4.0 × W2.1 × H3.3 m.