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    OPT-S-1500.jpg

    OPT-S 1500 – Magnetron Sputtering Optical Coating Equipment

    OPT-S 1500 is a magnetron sputtering optical coating machine with a Φ940 × H1000 mm effective coating area and a Φ1200 × H1650 mm chamber. It uses ion-source etching and 8 sputtering sources, with planar or cylindrical source options.
    The OPT-S series covers optical lenses, automotive panels, display screens, LiDAR and head-up displays. Its listed film types include cut-off, band-pass and RGB filters, AR, hard AR, IR-AR, HR, AS/AF and ITO coatings.

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      Key Benefits of OPT-S 1500 Optical Coating Equipment

      8 Sputtering Sources

      OPT-S 1500 is listed with 8 sputtering sources, with planar or cylindrical source options.

      Online Optical Monitoring

      The optical monitoring system provides real-time spectral monitoring and deposition endpoint control for multilayer films.

      Planetary Workpiece Motion

      Workpiece revolution and rotation support film-thickness distribution during optical multilayer deposition.

      Dense Optical Films

      The sputtering process supports dense, adherent films with low absorption and scattering losses.

      OPT-S 1500 Features

      • Φ940 × H1000 mm effective coating area
      • Φ1200 × H1650 mm chamber
      • Φ170 × 12 shafts workpiece carrier specification
      opts1500
      • 8 sputtering sources
      • 5 molecular pumps
      • Touch-screen and PLC control

      Product Parameter

      Model
      		 OPT-S 1500
      Coating Technology
      Magnetron sputtering
      Etching Technology Ion-source etching
      Substrate Materials
      Glass, crystalline materials, polymers, ceramics and metals
      Equipment Structure
      Integrated vertical system; side-opening door; 2 viewing windows
      Chamber Size (Diameter × Height)
      		 Φ1200 × H1650 mm
      Effective Coating Area (Diameter × Height)
      		 Φ940 × H1000 mm
      Workpiece Carrier Specification
      		 Φ170 × 12 shafts; adjustable according to requirements
      Workpiece Carrier Motion Vertical planetary cylindrical workpiece carrier system
      Sputtering Sources
      8; planar / cylindrical options
      Working Temperature Adjustable from room temperature to 300°C
      Ultimate Vacuum
      8 × 10⁻⁵ Pa (no-load, clean-room condition)
      Equipment Dimensions (L × W × H) L4.0 × W2.1 × H2.8 m

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      OPT-S 1500 Optical Coating Equipment FAQ

      Find answers about OPT-S 1500 optical coating equipment, including its coating process, applications and specifications.
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      1. What is OPT-S 1500 optical coating equipment used for?

      OPT-S 1500 belongs to the OPT-S series of magnetron sputtering optical coating systems. Listed applications include optical lenses, automotive panels, display screens, LiDAR and head-up displays.

      2. What substrates and coatings are listed for the OPT-S series?

      Substrates include glass, crystalline materials, polymers, ceramics and metals. Listed coatings include cut-off, band-pass and RGB filters, AR, hard AR, IR-AR, HR, AS/AF and ITO.

      3. What are the chamber size and effective coating area of OPT-S 1500?

      The chamber is Φ1200 × H1650 mm. The effective coating area is Φ940 × H1000 mm. These are separate specifications.

      4. How many sputtering sources does OPT-S 1500 have?

      OPT-S 1500 is listed with 8 sputtering sources. Planar and cylindrical source configurations are listed as options.

      5. What workpiece carrier configuration is listed?

      The listed workpiece carrier specification is Φ170 × 12 shafts, adjustable according to requirements. The system uses a vertical planetary cylindrical workpiece carrier.

      6. How are optical multilayers monitored?

      The OPT-S series uses an online optical monitoring system for real-time spectral monitoring and deposition endpoint control. Carrier revolution and rotation support film-thickness distribution.

      7. What are the working temperature and dimensions of OPT-S 1500?

      Working temperature is adjustable from room temperature to 300°C. Equipment dimensions are L4.0 × W2.1 × H2.8 m.