The application of coatings in the semiconductor industry

With the continuous advancement of the semiconductor manufacturing industry, where process technologies have progressed to 3nm and below, the requirements for semiconductor components have become increasingly stringent.  

- Nanoscale particulate contamination during processing has a particularly severe impact on sub-3nm chip manufacturing.  

- Wear and electrostatic accumulation significantly reduce the lifespan of components such as planetary wheels and wafer chucks, necessitating frequent downtime for cleaning and severely impacting production efficiency.  

- Traditional metal or ceramic coatings tend to generate particles due to friction, failing to meet current precision requirements and leading to reduced chip yield.  

DLC coatings with a thickness of 2–3 μm, fabricated using PECVD technology, offer critical advantages: 

- Low deposition temperature minimizes substrate thermal deformation.  

- High hardness (2,200–2,700 HV) and toughness ensure durability in acidic/alkaline environments.  

- Smooth, wear-resistant surface prevents debris and particle generation during friction.  

- High resistivity (10⁶–10⁸ Ω·cm) provides anti-static properties.  

Replacing traditional coatings with wear-resistant, high-resistivity DLC coatings delivers transformative improvements:  

1. Nanoparticle Control  

- Magnetron-sputtered DLC coatings achieve superior surface roughness and friction coefficients (CoF), reducing wear during wafer processing.  

- Particulate contamination is controlled within **Class 1 standards**.  

2. Component Longevity  

- CoF on planetary wheels drops **below 0.12**, extending service life by **4–6×**.  

3. Electrostatic Mitigation  

- Optimized resistivity (10⁶–10⁸ Ω·cm) minimizes electrostatic accumulation.  

- Reduces airborne particle adsorption and ESD damage, improving product yield.  

4. Thermal Stability  

- PECVD’s low-temperature deposition prevents thermal deformation in thin semiconductor components (e.g., planetary wheels).