HD500-Brand-new Composite Ion Coating Equipment of HD Series

The HD500 is built upon Huasheng's brand-new composite coating technology platform, enabling a composite process framework integrating high-ionization sputtering and arc processes. The films fabricated through this technology exhibit broader versatility. Notably, they demonstrate distinct advantages when dealing with hard-to-machine materials, including stainless steel and titanium alloys. This results in a substantial increase in service life.

Moreover, this technology offers more potential for future process advancements. Simultaneously, it features excellent flexibility, making it capable of meeting the requirements of small-scale coating production as well as process research and development.

HD500 Technical Characteristics

Unique Lateral Etching

√ Outstanding uniformity in lateral etching

√ Excellent etching overhang property and convenient maintenance

Composite HiPIMS Magnetron Sputtering

√ Equipped with DC + HiPIMS MS sources, it ensures high deposition rates while meeting the energy requirements for depositing refractory metals such as Nb, BC, W, V, etc., and is capable of depositing almost all materials.

Plasma-optimized Multi-arc Source

√ Equipped with 3 groups of 6 circular multi-arc target sources, the concealed arc initiation mechanism is reliable and easy to maintain.

√ It can easily achieve multi-element and multi-layer thin film deposition.

√ The optimized plasma multi-arc source ensures a smoother thin film surface.

√ The target material utilization rate is extremely high.

Multiple Deposition Technology Platforms

√ Realize multiple thin film deposition technologies on the same platform, including DC MS + HiPIMS MS + multi-arc ion plating, and can implement single, composite, and mixed coating methods in the same batch.

Product Parameter

HD500

Name	Parameter
Coating technology	Brand-new composite coating technology
Etching	Lateral ion source (hot filament)
Multi-arc sources (number)	6
Magnetron cathodes (number)	1
Equipment size (mm)	length3400width1600height2600
Chamber volume (m³)	0.7
Effective coating area (mm)	Ф410*400
Maximum working temperature (℃)	700
Loading capacity (number of trees)	5
Blade loading (APMT1135)	6000pcs
Rod blade loading capacity (D4*50L)	1800pcs
Maximum loading weight (KG)	300
Shaft diameter	Ф130
Process time	AlTiN：6~8h